What does DRIE mean in UNCLASSIFIED
Deep reactive ion etching (DRIE) is a highly efficient and precise process that is used in the production of microelectronic components and devices. It is an advanced etching process that uses highly reactive plasma to remove material from a substrate in order to produce intricate patterns and features. DRIE technology has been responsible for the development of modern electronic technologies such as microelectromechanical systems (MEMS), including devices like pressure sensors, accelerometers, gyroscopes and optical scanners.
DRIE meaning in Unclassified in Miscellaneous
DRIE mostly used in an acronym Unclassified in Category Miscellaneous that means Deep reactive ion etching
Shorthand: DRIE,
Full Form: Deep reactive ion etching
For more information of "Deep reactive ion etching", see the section below.
Essential Questions and Answers on Deep reactive ion etching in "MISCELLANEOUS»UNFILED"
What is DRIE?
DRIE stands for Deep Reactive Ion Etching and is a highly efficient and precise process used in the production of microelectronic components and devices.
How does deep reactive ion etching work?
DRIE uses a highly reactive plasma generated from rare gases such as CF4, SF6 or C4F8 to remove material from a substrate. This material can be removed layer by layer in order to create intricate patterns or features on the surface of the substrate.
What materials are commonly etched using DRIE technology?
Commonly etched materials include polymers, oxides, compound semiconductors, silicon nitride, amorphous silicon, metals, quartz crystals and silicon-based substrates such as glass or quartz.
Are there any limitations with deep reactive ion etching?
Yes, due to its precision nature it has some limitations which include not being able to penetrate through thick wafers with high aspect ratios, issues with creating large cavities or vias in substrates due to tight tolerances and potential re-deposition of particles on the walls of etched features which can cause contamination during fabrication processes.
What are common applications of DRIE technology?
Common applications include producing intricate patterns for MEMS devices like pressure sensors, accelerometers, gyroscopes and optical scanners along with other types of microelectronics such as integrated chipsets on computer motherboards.